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Technical Division, School of Engineering, Tohoku University

Instrumental Analysis Group

Home >> Fine structure analysis (B01)

Instruments of Fine structure analysis (B01)

FE-TEM FE-TEM/STEM LOW-TEM
FE-SEM FE-SEM/EBSP SIMS
AFM/SPM GD-OES Ion milling machine
Polishing machine
(Handy lap)
Precision rotating polishing machine Polishing machine
Cutting machine Carbon coater Metal coater
Plasma etching hydrophilic treatment apparatus Ion cleaner Vacuum impregnation system
Dimple grinder

FE-TEM

FE-TEM
Model Hitachi HF-2000
Accelerating voltage 200 kV
Resolution 0.20 nm
Electron gun Cold-FEG
Probe mode TEM
Applications Structural analysis (bright field image, dark field image, high resolution image, electron diffraction), elemental analysis (point, qualitative, quantitative) in the local region
Person in charge Miyazaki
Notes The specimen must be fixed to the observation grid (⌀3 mm) or it must be flaked. For sample preparation, please contact the person in charge.
Operation manual HF-2000 operation manual

FE-TEM/STEM

FE-TEM/STEM
Model JEOL JEM-2100F
Accelerating voltage 200 kV
Reaolusion Particle image: 0.19 nm, Lattice image: 0.1 nm
Electron gun Schottky-type FE electron gun
Probe mode TEM, STEM
Accessory device EDX
Detectable element: B - U
Energy resolution: 133 eV
STEM
Bottom-mounted CCD camera
Sample holder
Beryllium 2 axis inclination
Applications Structural analysis (bright field image, dark field image, high resolution image, electron diffraction), elemental analysis (point, mapping, qualitative, quantitative) in the local region.
Person in charge Miyazaki
Notes The specimen must be fixed to the observation grid (⌀3 mm) or it must be flaked. For sample preparation, please contact the person in charge.

LOW-TEM

LOW-TEM
Model Hitachi HT-7500
Accelerating voltage 100 kV
Resolution Particle image: 0.36 nm, Lattice image: 0.20 nm
Electron gun LaB6, W
Probe mode TEM
Accessory device Bottom-mounted CCD camera
Applications Structure analysis in local region (bright field image, dark field image, electron diffraction).
Person in charge Miyazaki
Notes The specimen must be fixed to the observation grid (⌀3 mm) or it must be flaked. For sample preparation, please contact the person in charge.
Operation manual HT-7500 operation manual

FE-SEM

FE-SEM
Model JEOL JSM-6500F
Accelerating voltage 3-30 kV
Resolution 1.5 nm
Electron gun Schottky-type electron gun(Thermal)
Observation mode Secondary electrons, reflected electrons, irregularities image.
Accessory device EDX
Backscattered electrons detector
Applications Morphological observation of ceramics and metals, elemental analysis (point, mapping, qualitative, quantitative)
Person in charge Miyazaki
Notes In principle, the user operates it. When using for the first time, please be sure to receive an operation course from the person in charge. The course time is about 1.5 hours from basic operation to analysis and analysis.
It is necessary that the sample is completely dry and the sample surface is in a conducting state. In case of uncertainty please contact the person in charge.

FE-SEM/EBSP

FE-SEM/EBSP
Model JEOL JSM-7100F
Accelerating voltage 1-30 kV
Resolution 1.2nm (@30kV), 3.0nm (@1kV)
Electron gun Schottky-type electron gun(Thermal)
Observation mode Secondary electrons, backscattered electrons, crystal orientation map (IPF, IQ, G.B. map)
Accessory device EDX-SDD
Backscattered electrons detector
Crystal orientation analyzer (EBSD)
Applications Morphological observation of ceramics and metals, elemental analysis (point, mapping, qualitative, quantitative).
Person in charge Miyazaki
Notes In principle, the user operates it. When using for the first time, please be sure to receive an operation course from the person in charge. The course time is about 1.5 hours from basic operation to analysis and analysis.
It is necessary that the sample is completely dry and the sample surface is in a conducting state. In case of uncertainty please contact the person in charge.

SIMS (Secondary ion mass spectrometer)

SIMS
Model CAMECA IMS-7f
Ion source O, Cs
Mass spectrometer Double focusing magnetic field mass spectrometer
Mass resolution M/ΔM >20,000
Secondary ion optics Projection, scan
Accessory device Electron gun, RAE, Storage Chamber
Applications Doping concentration and diffusion distribution, impurity amount, interface evaluation (impurity junction depth, diffusion of contaminant component), etc.
Person in charge Miyazaki
Notes In principle, this equipment is available for commissioned or witness analysis. Please contact the person in charge for details.

AFM/SPM

AFM/SPM
Model SII Nanocute
Measurement modes AFM, FFM, DFM, SSRM, Current (Nano, Pico)
Detection methods Self-detecting method, optical lever method
Resolution X, Y:Within 10 nm, Z:Within 0.5 nm
Applications Morphological observation in local region of sample surface.
Person in charge Miyazaki
Notes In principle, the user operates oneself. When using for the first time, please be sure to receive an operation course from the person in charge. The lesson time is about two hours.
Size and shape of sample are limited. Please contact the person in charge.
surface roughness parameter
Operation manual AFM-DFM operation manual

GD-OES (Glow Discharge Optical Emission Spectrometer)

GD-OES
Model HORIBA JOBIN YVON, GD-Profiler 2
Optical emission High Frequency Output: 0 - 300 W, pulse control: 1 - 100 Hz, gas pressure: 0 - 1000 Pa
Detector Photomultiplier tube
Spectrometer Polychrometer , monochromator
Anode diameter ⌀4mm (standard)
Target elements H -
Applications A sample is sputter-etched by a high-frequency pulsed glow discharge, and the sputter particles emitted from the sample are excited and emit light in the glow discharge, which is then spectrally analyzed for qualitative and quantitative analysis of elements in the depth direction.
Person in charge Miyazaki
Notes Please contact the person in charge when using the equipment.
The entire sample should be conductive and the surface to be analyzed should be smooth and flat.

Ion milling machine

Ion milling machine
Model GATAN PIPS Model 691
Ionization energy 0.5-6.0 keV
Beam irradiation angle 0.5-10°
Beam diameter ca. 350µm at 5keV
Gas Ar
Applications Thinning of sample for transmission electron microscope (TEM), final finish of polished surface.
Person in charge Miyazaki
Notes When using for the first time, please be sure to receive an operation course from the person in charge.
It must be fixed to the TEM mesh with a sample thickness of 50 µm or less. In case of uncertainty please contact the person in charge.
Operation manual PIPS691 operation manual

Polishing machine (Handy lap)

Handy lap
Model LaboPol-5
Rotational speed 50 - 500 rpm
Abrasive paper #240 - #8,000
Applications Thinning of specimen for microscopic observation or facing out.
Person in charge Miyazaki
Notes When using for the first time, please be sure to receive an operation course from the person in charge.

Precision rotating polishing machine

Precision rotating polishing machine
Model M-Prep5(ALLIED)
Rotational speed Max. 500 rpm
Abrasive paper ⌀200
Applications Thinning of specimen for microscopic observation or facing out.
Person in charge Miyazaki
Notes When using for the first time, please be sure to receive an operation course from the person in charge.

Polishing machine

Polishing machine
Model ML-150P
Rotation speed 30 - 150 rpm
Abrasive Colloidal silica, diamond slurry
Applications Mirror surface polishing of sample for microscopic observation
Person in charge Miyazaki
Notes When using for the first time, please be sure to receive an operation course from the person in charge.

Cutting machine

Cutting machine
Model Minitom (Marumoto struers)
Rotation speed 100 - 420 rpm
Cut wheel diameter 100 - 127 mm
Applications Cutting of samples for material microstructure inspection, ceramics samples etc.
Person in charge Miyazaki
Notes When using for the first time, please be sure to receive an operation course from the person in charge.

Carbon coater

Carbon coater
Model CC-40F
Coating method Thermal vapor deposition
Target Carbon
Film thickness nm - sub µm (adjustable by pressure or stage position)
Applications Antistatic prevention mainly for electron microscopic observation.
Person in charge Miyazaki
Notes When using for the first time, please be sure to receive an operation course from the person in charge.
Operation manual Carbon Coater operation manual

Metal coater

Metal coaters
Model JFC-1500
Coating method Sputtering
Target Au, Pt
Coating film thickness nm - sub µm (adjustable by sputtering pressure)
Applications Antistatic prevention mainly for electron microscopic observation.
Person in charge Miyazaki
Notes When using for the first time, please be sure to receive an operation course from the person in charge.
Operation manual Metal Coater operation manual

Plasma etching hydrophilic treatment apparatus

Plasma etching hydrophilic treatment apparatus
Model SEDE-MN
Gas Nitrogen, oxygen
Applications Removal of contamination on sample surface, hydrophilization treatment of carbon mesh, etc.
Person in charge Miyazaki
Notes When using for the first time, please be sure to receive an operation course from the person in charge.
Operation manual SEDE-MN Operation manual

Ion cleaner

Ion cleaner
Model JIC-410 (JEOL)
Discharge method Horizontal electrode type
Target Carbon
Vacuum chamber O.D. 118mm x height 37mm
Applications Removal of hydrocarbon contaminants adhering to the sample using glow discharge.
Person in charge Miyazaki
Notes When using for the first time, please be sure to receive an operation course from the person in charge.
Size and shape of sample are limited. Please contact the person in charge.

Vacuum impregnation system

Vacuum impregnation system
Model Cast N
Pressure during use 7×104 Pa
Applications Resin filling and fixing of sample
Person in charge Miyazaki
Notes When using for the first time, please be sure to receive an operation course from the person in charge.
Size and shape of sample are limited. Please contact the person in charge.

Dimple grinder

Dimple grinder
Model Gatan Model 656
Rotation speed 10 rpm
Grinding Wheel Speed 0 - 600 rpm
Load 0 - 40g
Final sample thickness 10µm
Applications The sample thinning treatment mainly for electron microscopic observation.
Person in charge Miyazaki
Notes When using for the first time, please be sure to receive an operation course from the person in charge.
Consumables such as abrasives are also available here, but as there are limited quantities, we may bring you depending on the usage situation. Please contact the person in charge for details.
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